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Angstrom Excellence

埃芯半导体

E芯 Semiconductor (Shenzhen E芯 Semiconductor Technology Co., Ltd.) was established in October 2020, focusing on metrology and inspection equipment for front-end semiconductor wafer manufacturing using optical and X-ray technologies.

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SVTR SignalInfrastructureCompute
Total funding $138M📍 Shenzhen · South ChinaFounded 2020

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Snapshot 2026-10-29
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About

E芯 Semiconductor (Shenzhen E芯 Semiconductor Technology Co., Ltd.) was established in October 2020, focusing on metrology and inspection equipment for front-end semiconductor wafer manufacturing using optical and X-ray technologies. Its products cover process control aspects such as film thickness, critical dimension, overlay, non-destructive elemental analysis, and stress, and extend to advanced packaging inspection and high-end scientific instruments, positioning itself as infrastructure for AI chip manufacturing yield control. It is a national specialized, refined, and innovative 'Little Giant' enterprise, with nearly 300 employees and a R&D ratio of about 60%, with R&D backbone mainly consisting of alumni from USTC. It completed a near-100 million RMB Series B+ round in July 2026 (led by Guoxin Fund, Kunpeng Capital, Hillhouse Capital, Yizhuang Guotou, and Zhongxin Juyuan), one of the largest single rounds in domestic semiconductor equipment in 2026.

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Funding history

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This company

  • Angstrom Excellence

    R&D and manufacturing of semiconductor front-end metrology and inspection equipment (optical/X-ray wafer metrology: film thickness, critical dimension OCD, overlay accuracy, material composition and stress analysis), as well as advanced packaging inspection and high-end scientific instruments

    Series B · $138M · 2026-07

China

Confirmed rounds only. Matched on subsector, sector, stage and funding scale — each verifiable on the company profiles.

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Investors that may fit

CAS Star

11 Compute deals in the last 24 months · 4 at a nearby stage · 11 in South China

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Shenzhen Capital Group

11 Compute deals in the last 24 months · 9 at a nearby stage · 11 in South China

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Inno Angel Fund

8 Compute deals in the last 24 months · 2 at a nearby stage · 8 in South China

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Bosch Ventures

7 Compute deals in the last 24 months · 7 at a nearby stage · 1 in South China

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IDG Capital

7 Compute deals in the last 24 months · 4 at a nearby stage · 5 in South China

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Menlo Ventures

6 Compute deals in the last 24 months · 5 at a nearby stage · 1 in South China

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Ranked by each firm’s deals in this sector over the last 24 months, weighted by nearby stage and shared geography. Indicative only — no rating judgment.

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